Apr 13, 2026

ULVAC M‑34 / M‑11,M-36 Sensor Head & Vacuum Measurement Assembly

OMRON Sensors Technology

ULVAC M‑24 / M‑24A Sensor Head & Vacuum Measurement Assembly

This page introduces ULVAC high‑performance vacuum sensor heads and related measurement units, widely used in precision vacuum monitoring for semiconductor, thin‑film, and vacuum equipment applications.

Key Models & Components

  • Sensor Head: M‑34, M‑36
  • Measuring Unit: WP‑01
  • Matching Gauge Types: M‑11, ISG1, IS‑BA1, GP‑H series
  • Display & Control: ST2 / ST3 panel, ×10 Pa scale, ERROR, DEG, ZERO, PROG, FIL indicators

Core Features

  • Precision Vacuum Sensing
    Built for stable, high‑resolution pressure detection in medium‑to‑high vacuum environments, supporting Pa‑scale readout.
  • Industrial‑Grade Reliability
    Rugged metal construction, designed for continuous operation; marked “Shock & Drop Prohibited” for safe handling.
  • User‑Friendly Operation
    Front‑panel indicators for status, degas, zero calibration, programming, and filament check simplify setup and maintenance.
  • Japan Origin & Quality
    Made in Japan by ULVAC, Inc., with strict quality control and serial‑number traceability.

Typical Applications

Semiconductor manufacturing, vacuum coating, vacuum furnaces, research vacuum systems, and automated vacuum‑process control.
These ULVAC sensor heads and measuring units provide stable, accurate vacuum monitoring for demanding industrial and research environments, ensuring process safety and repeatability.

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