ULVAC M‑34 / M‑11,M-36 Sensor Head & Vacuum Measurement Assembly
ULVAC M‑24 / M‑24A Sensor Head & Vacuum Measurement Assembly
This page introduces ULVAC high‑performance vacuum sensor heads and related measurement units, widely used in precision vacuum monitoring for semiconductor, thin‑film, and vacuum equipment applications.
Key Models & Components
- Sensor Head: M‑34, M‑36
- Measuring Unit: WP‑01
- Matching Gauge Types: M‑11, ISG1, IS‑BA1, GP‑H series
- Display & Control: ST2 / ST3 panel, ×10 Pa scale, ERROR, DEG, ZERO, PROG, FIL indicators
Core Features
- Precision Vacuum SensingBuilt for stable, high‑resolution pressure detection in medium‑to‑high vacuum environments, supporting Pa‑scale readout.
- Industrial‑Grade ReliabilityRugged metal construction, designed for continuous operation; marked “Shock & Drop Prohibited” for safe handling.
- User‑Friendly OperationFront‑panel indicators for status, degas, zero calibration, programming, and filament check simplify setup and maintenance.
- Japan Origin & QualityMade in Japan by ULVAC, Inc., with strict quality control and serial‑number traceability.
Typical Applications
Semiconductor manufacturing, vacuum coating, vacuum furnaces, research vacuum systems, and automated vacuum‑process control.
These ULVAC sensor heads and measuring units provide stable, accurate vacuum monitoring for demanding industrial and research environments, ensuring process safety and repeatability.






