ULVAC SWP-N1, SWP-N-16, SP1, SH2-1, M-36, M-34 Product Introduction
ULVAC offers a series of high-performance vacuum measurement products, including SWP-N1, SWP-N-16, SP1, SH2-1, M-36, and M-34. These products are engineered for precise and reliable vacuum monitoring across various pressure ranges, widely applied in semiconductor, industrial manufacturing, and scientific research fields.
SWP-N1 & SWP-N-16
SWP-N1 and SWP-N-16 are compact Pirani gauge heads, specifically designed as replacement parts for ULVAC’s SW1-N1 Pirani gauges. SWP-N-16 features an NW16 flange, suitable for measuring atmospheric pressure to low vacuum (1×10⁵ Pa to 5×10⁻² Pa). SWP-N1 is optimized for space-saving and cost-effective installations, equipped with a corrosion-resistant platinum filament for long-term stability and easy replacement, fully compatible with SW1-N1 control units.
SP1
As a member of the G-TRAN series, the SP1 is an integrated Pirani vacuum gauge sensor unit, combining sensor and circuit into one compact design for low-cost and space-efficient operation. It covers a pressure range of 1×10⁵ Pa to 5×10⁻² Pa (low vacuum), provides a 0–5 VDC nonlinear analog output and two setpoints for convenient control. Powered by 24 VDC, it is compatible with WP-01/02/03/16 sensor heads, ideal for semiconductor equipment, industrial furnaces, and inline process chambers.
SH2-1
The SH2-1, part of the G-TRAN series, is a standard B-A ionization gauge designed for ultra-high vacuum (UHV) measurement, supporting multi-sensor connectivity. Its measurement range is 5×10⁻⁸ Pa to 1×10¹ Pa (single unit), and can be extended to 1×10⁵ Pa with optional SPU/SWU modules. It outputs a 0–10 VDC logarithmic analog signal (0.75 V/decade) with a sampling rate of 70 ms, compatible with M-34, M-35, and M-36 gauge heads. It supports standalone ionization mode, Pirani combination mode (with SPU), and triple combination mode (with SPU+SAU).
M-36 & M-34
M-34 and M-36 are high-precision ionization gauge heads, specially matched with SH2-1/SH2-2 controllers for accurate UHV measurement. M-34 comes with an NW16 flange, suitable for general UHV applications. M-36 is equipped with a UFC070 flange, designed for specialized high-vacuum systems. Both models feature 1 mA emission current, approximately 330 V grid voltage, and electron bombardment degas capability, ensuring high stability and measurement accuracy.
All these products adopt a modular design, allowing flexible combination of sensors and controllers to meet different application needs. With compact structure, durable performance, and versatile output, they provide reliable vacuum measurement solutions for various industrial and scientific scenarios.