ULVAC Vacuum Gauge System (M-11, ISG1, IS-BA1, GP-H)

Core Components & Key Features

1. M-11 Ionization Gauge Sensor

• Pressure Range: 5×10⁻⁸ Pa to 10 Pa (3.75×10⁻¹⁰ Torr to 7.5×10⁻² Torr)
• Design: Robust metal tube construction, compatible with B-A type sensor headsULVAC Technologies, Inc.
• Accuracy: ±15% of reading (N₂ reference), ensuring stable UHV monitoring
• Application: Ideal for high-vacuum processes like evaporation, sputtering, and vacuum furnaces

2. ISG1 Single-Channel Display Unit

• Compatibility: Supports all G-TRAN series sensors (including IS-BA1, GP-H) and CCM series capacitance manometers
• Display: High-visibility LED readout (2-digit mantissa, 1-digit exponent, □.□×10□ Pa)
• Outputs: 0–10 V linear analog output, 3 setpoint relay outputs, and standard RS485 serial communication
• Power: DC 24 V (AC 100–240 V compatible with optional adapter); CE-compliant
• Functionality: Enables remote monitoring, pressure setpoint control, and real-time status indication

3. IS-BA1 B-A Type Ionization Sensor

• Principle: Hot cathode ionization; measures pressure via ion current generated by electron-gas molecule collisions
• Range: 1×10⁻⁷ Pa to 1×10⁻¹ Pa, covering high-vacuum process requirements
• Features: Miniaturized design, filament life monitoring, and excellent stability in harsh vacuum environments
• Accuracy: ±2% (N₂), suitable for precise process control

4. GP-H Pirani Vacuum Gauge

• Principle: Constant-temperature Pirani design using a corrosion-resistant platinum filament
• Pressure Range: 5×10⁻² Pa to 1×10⁵ Pa (atmosphere), covering rough and low-vacuum regions
• Output: 0–10 V logarithmic analog output; compatible with ISG1 for integrated readout
• Features: Resists burnout at atmospheric pressure, requires no recalibration after cable length changes, and includes ambient temperature compensation
• Application: Perfect for roughing line monitoring, pumpdown control, and low-vacuum process verification

System Advantages

• Wide Range Coverage: Combined, the sensors span from atmospheric pressure to 5×10⁻⁸ Pa, eliminating gaps in vacuum monitoring.
• Modular Flexibility: Mix-and-match sensors (M-11/IS-BA1 for high vacuum, GP-H for low vacuum) with the ISG1 display to suit specific process needs.
• High Precision & Stability: Sensors deliver consistent accuracy, while the ISG1’s digital display and noise immunity ensure reliable data in industrial settings.
• Easy Integration: Compact dimensions, standard signals, and CE compliance simplify installation into new or existing vacuum systems.
• Low Maintenance: Robust sensor designs (platinum filaments, metal envelopes) and filament life alerts reduce downtime and operational costs.

Typical Applications

• Semiconductor manufacturing (etching, deposition, vacuum packaging)
• Flat-panel display (FPD) production
• Solar cell fabrication
• Vacuum coating and thin-film processes
• Industrial vacuum furnaces and heat treatment
• Research laboratories requiring precise vacuum control