ULVAC HIGH VACUUM OIL Z-300 & VACUUM WP-01/WP-02/WP-03 Series
ULVAC’s Z-300 High Vacuum Oil (ULVOIL Z-300) is a premium fluorine-based synthetic vacuum grease engineered for ultra-high vacuum environments, paired with the WP-01/WP-02/WP-03 dry vacuum pump series—offering a complete, contamination-free vacuum solution for precision industrial and scientific applications.
ULVAC Z-300 High Vacuum Oil
- Base Composition: Formulated with fluorine-based synthetic oil as the base stock, blended with PTFE thickeners to deliver exceptional lubrication and sealing performance in extreme vacuum conditions.
- Key Properties:
- Ultra-Low Vapor Pressure: Base oil vapor pressure as low as 2.8×10⁻⁷ Pa at 20°C, minimizing outgassing and ensuring stable high-vacuum integrity.
- Wide Temperature Range: Operates reliably from -70°C to 250°C, suitable for cryogenic and high-temperature vacuum systems.
- Excellent Chemical Stability: Resists oxidation, corrosion, and chemical attack from process gases, extending service life and reducing maintenance.
- Low Contamination: Minimizes hydrocarbon and particulate contamination, critical for semiconductor, optical coating, and clean vacuum processes.
- Physical Specifications: White, viscous paste; density 1.97 g/cm³; oil separation 8.6% at 200°C×24h; viscosity index 355.
- Primary Functions: Provides superior lubrication, airtight sealing, heat dissipation, and anti-wear protection for vacuum pump shafts, valves, seals, and high-vacuum mechanical components.
ULVAC WP-01/WP-02/WP-03 Vacuum Pumps
- Design & Technology: Dry screw-claw vacuum pumps featuring non-contact rotor design, eliminating internal oil lubrication and preventing oil vapor back-contamination of process chambers.
- Core Advantages:
- Ultra-Clean Operation: Oil-free compression chamber ensures zero oil mist emissions, ideal for hydrocarbon-sensitive applications.
- Corrosion Resistance: Optimized gas path and specialized surface coatings withstand corrosive gases and condensable solvents in CVD, cleaning, and coating processes.
- Energy & Noise Efficiency: Low power consumption and quiet operation (<65dB), reducing operational costs and improving workplace comfort.
- Long Service Life: Non-contact design minimizes wear, extending maintenance intervals and pump durability.
- Vacuum Performance: Delivers stable medium-to-high vacuum levels, compatible with Z-300 grease for external sealing and lubrication of pump interfaces and auxiliary vacuum components.
Combined Applications
This integrated solution serves high-demand vacuum environments including:
- Semiconductor manufacturing & thin-film deposition
- Optical coating & precision vacuum metallization
- Laboratory research & analytical instrumentation
- Vacuum heat treatment, sintering, and brazing
- Pharmaceutical & food packaging requiring ultra-clean vacuum
Why Choose ULVAC
ULVAC’s Z-300 grease and WP-series pumps are engineered to maximize vacuum system performance, ensure process purity, and lower total ownership cost—backed by ULVAC’s decades of expertise in vacuum technology and industrial-grade reliability.
